The influence of substrate temperature and sputtering gas atmosphere on the electrical properties of reactively sputtered indium tin oxide filmsShozaburo Nishikawa · 1986

Influence of substrate temperature and deposition rate on structure of thick sputtered Cu coatingsThornton, John A. · Journal of Vacuum Science and Technology · 1975

Magnetic Domains in Thin Sputtered FeSi Films. I. Edge Effects and Influence of the Substrate Temperature and the Ar Pressure during SputteringI. Pockrand; J. Verweel · 1975

Influence of the substrate material, substrate temperature and sputtered lead flux on the in-situ perovskite phase formationJaber, B.; Remiens, D.; Thierry, B.; Chaouch, M. · Integrated Ferroelectrics · 1997

Influence of substrate temperature on the orientation and optical properties of sputtered ZnO filmsX.H. Li; A.P. Huang; M.K. Zhu; Xu; J. Chen; H. Wang; B. Wang; H. Yan · 2003

Influence of substrate properties and annealing temperature on the stress state of magnetron sputtered tungsten thin filmsJ. C. Oliveira; A. Cavaleiro · 2006

Influence of substrate temperature on structural and optical properties of RF sputtered ZnMnO thin filmsPashaei, Parisa; Akin, Nihan; Ceren Baskose, U.; Kemal Ozturk, M.; Cakmak, Mehmet; Ozcelik, Suleyman · Semiconductors · 2015