Processing and characterization of ultralow-dielectric constant organosilicate

S. Yang; J. C. Pai; C. Pai; G. Dabbagh; O. Nalamasu; E. Reichmanis; J. Seputro; Y. S. Obeng

作者S. Yang; J. C. Pai; C. Pai; G. Dabbagh; O. Nalamasu; E. Reichmanis; J. Seputro; Y. S. Obeng
文件大小456.47KB
发表时间2001
DOI10.1116/1.1417542

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