SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] Design, Characterization, and Packaging for MEMS and Microelectronics II - Force-deflection behavior of piezoelectric actuators
- 作者Singh, Ashok K.; Nagpal, Pawan; Franzon, Paul D.; Malshe, Ajay P.; Tay, Francis E.
- 卷第4593卷
- 印刷ISSN0277-786X
- 文件大小770.27KB
- 发表时间2001
- DOI10.1117/12.448855
- 页码244-254
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