Quantum Chemical Study on Decomposition and Polymer Deposition in Perfluorocarbon Plasmas: Molecular Orbital Calculations of Excited States of Perfluorocarbons
- 期刊名称Japanese Journal of Applied Physics
- 作者Nakamura, Toshihiro; Motomura, Hideki; Tachibana, Kunihide
- 卷第40卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小477.74KB
- 发表时间2001-2-15
- DOI10.1143/JJAP.40.847
- 页码847-854
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