[IEEE ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics - Honolulu, HI, USA (21 July-2 Aug. 2000)] ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics (IEEE Cat. No.00CH37076) - Synthesis and characterization of TiO/sub 2/ films for deep trench capacitor applications
Jammy, R.; Schroeder, U.; Wong, K.; Bruley, J.; Shepard, J.; DeHaven, P.; Michaelis, A.; Woods, L.
- 作者Jammy, R.; Schroeder, U.; Wong, K.; Bruley, J.; Shepard, J.; DeHaven, P.; Michaelis, A.; Woods, L.
- 卷第1卷
- 文件大小432.50KB
- 发表时间2001
- DOI10.1109/isaf.2000.941530
- 页码147-150