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SPIE Proceedings [SPIE Lasers in Metrology and Art Conservation - Munich, Germany (Monday 18 June 2001)] Microsystems Engineering: Metrology and Inspection - <title>Waveguide microinterferometry system for microelements investigation</title>

SPIE Proceedings [SPIE Lasers in Metrology and Art Conservation - Munich, Germany (Monday 18 June 2001)] Microsystems Engineering: Metrology and Inspection - Waveguide microinterferometry system for microelements investigation

Salbut, Leszek A.; Jozwik, Michal; Gorecki, Christophe; Lee, Seung S.; Gorecki, Christophe; Jueptner, Werner P. O.; Kujawinska, Malgorzata
  • 作者Salbut, Leszek A.; Jozwik, Michal; Gorecki, Christophe; Lee, Seung S.; Gorecki, Christophe; Jueptner, Werner P. O.; Kujawinska, Malgorzata
  • 卷第4400卷
  • 印刷ISSN0277-786X
  • 文件大小342.49KB
  • 发表时间2001
  • DOI10.1117/12.445596
  • 页码138-143
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