SPIE Proceedings [SPIE Lasers in Metrology and Art Conservation - Munich, Germany (Monday 18 June 2001)] Microsystems Engineering: Metrology and Inspection - Paraboloidal ellipsometer with accurate retardance and latitude
Wu, Jiun-Yan; Shiue, Shuen-Chen; Lee, Chih-Kung; Lee, Solomon J. H.; Gorecki, Christophe; Jueptner, Werner P. O.; Kujawinska, Malgorzata
- 作者Wu, Jiun-Yan; Shiue, Shuen-Chen; Lee, Chih-Kung; Lee, Solomon J. H.; Gorecki, Christophe; Jueptner, Werner P. O.; Kujawinska, Malgorzata
- 卷第4400卷
- 印刷ISSN0277-786X
- 文件大小664.76KB
- 发表时间2001
- DOI10.1117/12.445607
- 页码70-81