[Weber Co 11th International Conference 'Microwave and Telecommunication Technology'. Conference Proceedings - Sevastopol, Crimea, Ukraine (10-14 Sept. 2001)] 11th International Conference 'Microwave and Telecommunication Technology'. Conference Proceedings (IEEE Cat. No.01EX487) - Investigation of spatial homogeneity of microwave discharge plasma by means of optical emission spectroscopy method
Bordusov, S.V.; Dostanko, A.P.; Spiridonov, S.V.
- 作者Bordusov, S.V.; Dostanko, A.P.; Spiridonov, S.V.
- 文件大小338.91KB
- 发表时间2001
- DOI10.1109/CRMICO.2001.961678
- 页码583-585