Gas phase analysis of TiCl4 plasma processes by molecular beam mass spectrometry
- 作者Derk Andrew Wierda; Chandra M Reddy; Carmela C Amato-Wierda
- 卷第148卷
- 印刷ISSN0257-8972
- 文件大小329.91KB
- 发表时间2001
- DOI10.1016/s0257-8972(01)01343-3
- 页码256-261
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