Structural, mechanical and tribological properties of diamond-like carbon films prepared under different substrate bias voltage

• 期刊名称Diamond and Related Materials
• 作者Zhang, Wei; Tanaka, Akihiro; Wazumi, Koichiro; Koga, Yoshinori
• 卷第11卷
• 期第11期
• 印刷ISSN0925-9635
• 文件大小1077.08KB
• 发表时间2002-11
• DOI10.1016/S0925-9635(02)00169-3
• 页码1837-1844