[IEEE IEEE 29th International Conference on Plasma Sciences - Banff, Alta., Canada (26-30 May 2002)] IEEE Conference Record - Abstracts. 2002 IEEE International Conference on Plasma Science (Cat. No.02CH37340) - Deposition of TiN films on the inner wall of a pipe by DC vacuum cathodic arc deposition and PBII

• 作者Xinxin Ma, ; Yukimura, K.; Kumagai, M.; Maruyama, T.; Kohata, M.; Saito, H.
• 文件大小93.38KB
• 发表时间2002
• DOI10.1109/plasma.2002.1030544