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Effects of visible light illumination during plasma enhanced chemical vapor deposition growth on the film properties of hydrogenated amorphous silicon

Effects of visible light illumination during plasma enhanced chemical vapor deposition growth on the film properties of hydrogenated amorphous silicon

Sakata, I.; Yamanaka, M.
  • 期刊名称Journal of Applied Physics
  • 作者Sakata, I.; Yamanaka, M.
  • 卷第91卷
  • 期第2期
  • 印刷ISSN0021-8979
  • 文件大小353.78KB
  • 发表时间2002
  • DOI10.1063/1.1421242
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