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Plasma recovery in plasma immersion ion implantation: dependence on pulse frequency and duty cycle

Plasma recovery in plasma immersion ion implantation: dependence on pulse frequency and duty cycle

Briehl, Boris; Urbassek, Herbert M

期刊名称Journal of Physics D: Applied Physics
作者Briehl, Boris; Urbassek, Herbert M
卷第35卷
期第5期
印刷ISSN0022-3727
电子ISSN1361-6463
文件大小514.56KB
发表时间2002-03-07
DOI10.1088/0022-3727/35/5/308
页码462-467

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