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[IEEE 2002 Symposium on VLSI Technology Digest of Technical Papers - Honolulu, HI, USA (11-13 June 2002)] 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303) - MEMS technology: optical application, medical application and SOC application

[IEEE 2002 Symposium on VLSI Technology Digest of Technical Papers - Honolulu, HI, USA (11-13 June 2002)] 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303) - MEMS technology: optical application, medical application and SOC application

Esashi, M.

作者Esashi, M.
文件大小546.98KB
发表时间2002
DOI10.1109/vlsit.2002.1015366
页码6-9

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