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[IEEE 2002 Symposium on VLSI Technology Digest of Technical Papers - Honolulu, HI, USA (11-13 June 2002)] 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303) - Lithography solution for 65-nm node system LSIs

[IEEE 2002 Symposium on VLSI Technology Digest of Technical Papers - Honolulu, HI, USA (11-13 June 2002)] 2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303) - Lithography solution for 65-nm node system LSIs

Matsuo, T.; Endo, M.; Kishimura, S.; Misaka, A.; Sasago, M.

作者Matsuo, T.; Endo, M.; Kishimura, S.; Misaka, A.; Sasago, M.
文件大小257.77KB
发表时间2002
DOI10.1109/vlsit.2002.1015450
页码196-197

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