A thermomechanical model for adhesion reduction of MEMS cantilevers
- 期刊名称Journal of Microelectromechanical Systems
- 作者Rogers, J.W.; Mackin, T.J.; Phinney, L.M.
- 卷第11卷
- 期第5期
- 印刷ISSN1057-7157
- 文件大小357.89KB
- 发表时间2002-10
- DOI10.1109/jmems.2002.803412
- 页码512-520
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