Plasma molding over surface topography: Simulation of ion flow, and energy and angular distributions over steps in RF high-density plasmas
- 期刊名称IEEE Transactions on Plasma Science
- 作者Doosik Kim, ; Economou, D.J.
- 卷第30卷
- 期第5期
- 印刷ISSN0093-3813
- 文件大小592.96KB
- 发表时间2002-10
- DOI10.1109/tps.2002.805326
- 页码2048-2058
[IEEE Fifth IEEE International Conference on Data Mining (ICDM'05) - Houston, TX, USA (2005.11.27-2005.11.30)] Fifth IEEE International Conference on Data Mining (ICDM'05) - Proceedings. Fifth IEEE International Conference on Data Mining2005
[IEEE Fifth IEEE International Conference on Data Mining (ICDM'05) - Houston, TX, USA (2005.11.27-2005.11.30)] Fifth IEEE International Conference on Data Mining (ICDM'05) - Fifth IEEE International Conference on Data Mining - Cover2005
[IEEE Fifth IEEE International Conference on Data Mining (ICDM'05) - Houston, TX, USA (2005.11.27-2005.11.30)] Fifth IEEE International Conference on Data Mining (ICDM'05) - Fifth IEEE International Conference on Data Mining - Copyright Page2005
[IEEE Fifth IEEE International Conference on Data Mining (ICDM'05) - Houston, TX, USA (2005.11.27-2005.11.30)] Fifth IEEE International Conference on Data Mining (ICDM'05) - Fifth IEEE International Conference on Data Mining - Table of Contents2005
[IEEE Proceedings. Fifth IEEE International Conference on Data Mining - Houston, TX (2005.11.27-2005.11.30)] Fifth IEEE International Conference on Data Mining (ICDM'05) - Conference organization2005
[IEEE Proceedings. Fifth IEEE International Conference on Data Mining - Houston, TX (2005.11.27-2005.11.30)] Fifth IEEE International Conference on Data Mining (ICDM'05) - Program Committee2005
[IEEE Proceedings. Fifth IEEE International Conference on Data Mining - Houston, TX (2005.11.27-2005.11.30)] Fifth IEEE International Conference on Data Mining (ICDM'05) - Steering Committee2005
[IEEE Fifth IEEE International Conference on Data Mining (ICDM'05) - Houston, TX, USA (2005.11.27-2005.11.30)] Fifth IEEE International Conference on Data Mining (ICDM'05) - Tutorials2005