Optimal scheduling techniques for cluster tools with process-module and transport-module residency constraints

• 期刊名称IEEE Transactions on Semiconductor Manufacturing
• 作者Rostami, S.; Hamidzadeh, B.
• 卷第15卷
• 期第3期
• 印刷ISSN0894-6507
• 文件大小359.80KB
• 发表时间2002-08
• DOI10.1109/tsm.2002.801379
• 页码341-349