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Simple method for cleaning gallium nitride (0001)

Machuca, Francisco; Liu, Zhi; Sun, Yun; Pianetta, P.; Spicer, W. E.; Pease, R. F. W.

期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
作者Machuca, Francisco; Liu, Zhi; Sun, Yun; Pianetta, P.; Spicer, W. E.; Pease, R. F. W.
卷第20卷
期第5期
印刷ISSN0734-2101
文件大小321.03KB
发表时间2002
DOI10.1116/1.1503782