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[IEEE SCS 2003 International Symposium on Signals Circuits and Systems Proceedings (Cat No 03EX720) IIT-02 - Taos, New Mexico, USA (2002.09.27-2002.09.27)] SCS 2003 International Symposium on Signals Circuits and Systems Proceedings (Cat No 03EX720) IIT-02 - Optimized BF/sub 3/ P/sup 2/ LAD implantation with Si-PAI for shallow, abrupt and high quality p/sup +//n junctions formed using low temperature SPE annealing

[IEEE SCS 2003 International Symposium on Signals Circuits and Systems Proceedings (Cat No 03EX720) IIT-02 - Taos, New Mexico, USA (2002.09.27-2002.09.27)] SCS 2003 International Symposium on Signals Circuits and Systems Proceedings (Cat No 03EX720) IIT-02 - Optimized BF/sub 3/ P/sup 2/ LAD implantation with Si-PAI for shallow, abrupt and high quality p/sup +//n junctions formed using low temperature SPE annealing

Felch, ; Borland, ; Ziwie Fang, ; Bon-Woong Koo, ; Gossmann, ; Jones, ; Lindfors,
  • 作者Felch, ; Borland, ; Ziwie Fang, ; Bon-Woong Koo, ; Gossmann, ; Jones, ; Lindfors,
  • 文件大小344.24KB
  • 发表时间2002
  • DOI10.1109/IIT.2002.1257936
  • 页码52-55
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