Electrolyzed Water as an Alternative for Environmentally Benign Semiconductor Cleaning
- 期刊名称Journal of Materials Research
- 作者Ryoo, Kunkul; Kang, Byeongdoo; Sumita, Osao
- 卷第17卷
- 期第6期
- 印刷ISSN0884-2914
- 电子ISSN2044-5326
- 文件大小516.30KB
- 发表时间2002-6
- DOI10.1557/JMR.2002.0194
- 页码1298-1304
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