X-Ray Stress Measurements of TiCN Thin Films
- 期刊名称Materials Science Forum
- 作者Gotoh, Masahide; Murotani, Takayuki; Sasaki, Toshihiko; Hirose, Yukio
- 电子ISSN1662-9752
- 文件大小325.78KB
- 发表时间2002
- DOI10.4028/www.scientific.net/MSF.404-407.677
- 页码677-682
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