High numerical aperture lithographic imagery at the Brewster angle

• 期刊名称Journal of Micro/Nanolithography, MEMS, and MOEMS
• 作者Brunner, Timothy A.
• 卷第1卷
• 期第3期
• 印刷ISSN1932-5150
• 文件大小584.33KB
• 发表时间2002-10-01
• DOI10.1117/1.1507337