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Piezoelectric Multilayer Microactuators for High Track Density Hard Disk Drives

Piezoelectric Multilayer Microactuators for High Track Density Hard Disk Drives

Zhu, Weiguang; Wang, Zhi Hong; Yao, Kui; Yao, Xi

期刊名称Key Engineering Materials
作者Zhu, Weiguang; Wang, Zhi Hong; Yao, Kui; Yao, Xi
电子ISSN1662-9795
文件大小460.69KB
发表时间2002
DOI10.4028/www.scientific.net/kem.228-229.31
页码31-36

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