Diamond nanoimprint lithography
Taniguchi, Jun; Tokano, Yuji; Miyamoto, Iwao; Komuro, Masanori; Hiroshima, Hiroshi
- 期刊名称Nanotechnology
- 作者Taniguchi, Jun; Tokano, Yuji; Miyamoto, Iwao; Komuro, Masanori; Hiroshima, Hiroshi
- 卷第13卷
- 期第5期
- 印刷ISSN0957-4484
- 文件大小215.23KB
- 发表时间2002-10-01
- DOI10.1088/0957-4484/13/5/309
- 页码592-596