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Growth and morphology of magnetron sputter deposited silver films

Growth and morphology of magnetron sputter deposited silver films

M. Del Re; R. Gouttebaron; J.P. Dauchot; P. Leclère; R. Lazzaroni; M. Wautelet; M. Hecq
  • 作者M. Del Re; R. Gouttebaron; J.P. Dauchot; P. Leclère; R. Lazzaroni; M. Wautelet; M. Hecq
  • 印刷ISSN0257-8972
  • 文件大小319.29KB
  • 发表时间2002
  • DOI10.1016/s0257-8972(01)01592-4
  • 页码86-90
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