Confocal optoelectronic holography microscope for materials and structural characterization of MEMS
- 期刊名称MRS Proceedings
- 作者Furlong, Cosme; Siegel, Adam M.; Pryputniewicz, Ryszard J.
- 卷第738卷
- 电子ISSN1946-4274
- 文件大小277.05KB
- 发表时间2002-1
- DOI10.1557/proc-738-g12.4
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