Reproducibility of Nano- and Micro-Scale Multi-Point Probe Sheet Resistance Measurements
- 期刊名称MRS Proceedings
- 作者Petersen, Christian L.; Worledge, Daniel; Petersen, Peter R. E.
- 卷第738卷
- 电子ISSN1946-4274
- 文件大小376.11KB
- 发表时间2002-1
- DOI10.1557/proc-738-g4.3
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