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MOCVD of HfO2 from Alkoxide and Alkylamide Precursors

Roberts, John L.; Williams, Paul A.; Jones, Anthony C.; Marshall, Paul; Chalker, Paul R.; Bickley, Jamie F.; Davies, Hywel O.; Smith, Lesley M.

期刊名称MRS Proceedings
作者Roberts, John L.; Williams, Paul A.; Jones, Anthony C.; Marshall, Paul; Chalker, Paul R.; Bickley, Jamie F.; Davies, Hywel O.; Smith, Lesley M.
卷第745卷
电子ISSN1946-4274
文件大小719.13KB
发表时间2002-1
DOI10.1557/proc-745-n5.9