Characterization of Eu- and Y-polytantalate Films Deposited by RF Diode Sputtering
Vasilyev, Vladimir S.; Drehman, Alvin J.; Bouthillette, Lionel O.
- 期刊名称MRS Proceedings
- 作者Vasilyev, Vladimir S.; Drehman, Alvin J.; Bouthillette, Lionel O.
- 卷第749卷
- 电子ISSN1946-4274
- 文件大小863.96KB
- 发表时间2002-1
- DOI10.1557/proc-749-w5.8