Metalorganic chemical vapor deposition of aluminum oxide on silicon nitride
- 期刊名称MRS Proceedings
- 作者Dasgupta, Anindya; Chowdhuri, Abhijit Roy; Takoudis, Christos G.
- 卷第751卷
- 电子ISSN1946-4274
- 文件大小104.34KB
- 发表时间2002-1
- DOI10.1557/proc-751-z3.45
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