SPIE Proceedings [SPIE High-Power Lasers and Applications - San Jose, CA (Friday 18 January 2002)] Photon Processing in Microelectronics and Photonics - Glass micromachining using the VUV F<formula><inf><roman>2</roman></inf></formula> laser
Dyer, Peter E.; Maswadi, Saher M.; Snelling, Howard V.; Walton, Christopher D.; Sugioka, Koji; Gower, Malcolm C.; Haglund, Jr., Richard F.; Pique, Alberto; Traeger, Frank; Dubowski, Jan J.; Hoving, Willem
- 作者Dyer, Peter E.; Maswadi, Saher M.; Snelling, Howard V.; Walton, Christopher D.; Sugioka, Koji; Gower, Malcolm C.; Haglund, Jr., Richard F.; Pique, Alberto; Traeger, Frank; Dubowski, Jan J.; Hoving, Willem
- 卷第4637卷
- 印刷ISSN0277-786X
- 文件大小333.01KB
- 发表时间2002
- DOI10.1117/12.470626
- 页码218-227