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SPIE Proceedings [SPIE SPIE's 9th Annual International Symposium on Smart Structures and Materials - San Diego, CA (Sunday 17 March 2002)] Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology - <title>Design concept and preliminary experimental demonstration of MEMS gyroscopes with 4-DOF master-slave architecture</title>

SPIE Proceedings [SPIE SPIE's 9th Annual International Symposium on Smart Structures and Materials - San Diego, CA (Sunday 17 March 2002)] Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology - Design concept and preliminary experimental demonstration of MEMS gyroscopes with 4-DOF master-slave architecture

Acar, Cenk; Shkel, Andrei M.; Varadan, Vijay K.
  • 作者Acar, Cenk; Shkel, Andrei M.; Varadan, Vijay K.
  • 卷第4700卷
  • 印刷ISSN0277-786X
  • 文件大小847.96KB
  • 发表时间2002
  • DOI10.1117/12.475019
  • 页码77-88
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