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Pore Etching in Compound Semiconductors for the Production of Photonic Crystals

Foell, Helmut; Langa, Sergiu; Carstensen, Juergen; Christophersen, Marc; Tiginyanu, Ivan; Dichtel, Karin

期刊名称MRS Proceedings
作者Foell, Helmut; Langa, Sergiu; Carstensen, Juergen; Christophersen, Marc; Tiginyanu, Ivan; Dichtel, Karin
卷第722卷
电子ISSN1946-4274
文件大小3453.58KB
发表时间2002
DOI10.1557/PROC-722-L6.4