Cleaning of diffusion bonding surface by argon ion bombardment treatment
- 作者Airu Wang; Osamu Ohashi; Norio Yamaguchi; Masanori Aoki; Yasuo Higashi; Nobuteru Hitomi
- 卷第206卷
- 印刷ISSN0168-583X
- 文件大小211.19KB
- 发表时间2003
- DOI10.1016/s0168-583x(03)00732-8
- 页码219-223