Voltage dependence of cluster size in carbon films using plasma immersion ion implantation

D.R. McKenzie; R.N. Tarrant; M.M.M. Bilek; G. Pearce; N.A. Marks; D.G. McCulloch; S.H.N. Lim

作者D.R. McKenzie; R.N. Tarrant; M.M.M. Bilek; G. Pearce; N.A. Marks; D.G. McCulloch; S.H.N. Lim
卷第206卷
印刷ISSN0168-583X
文件大小139.09KB
发表时间2003
DOI10.1016/s0168-583x(03)00831-0
页码741-744

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