Maskless Mn implantation in GaAs using focused Mn ion beam
- 作者M. Itou; M. Kasai; T. Kimura; J. Yanagisawa; F. Wakaya; Y. Yuba; K. Gamo
- 卷第206卷
- 印刷ISSN0168-583X
- 文件大小229.57KB
- 发表时间2003
- DOI10.1016/s0168-583x(03)00924-8
- 页码1013-1017
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