Electrostatic charge and field sensors based on micromechanical resonators
- 作者Riehl, P.S.; Scott, K.L.; Muller, R.S.; Howe, R.T.; Yasaitis, J.A.
- 卷第12卷
- 期第5期
- 印刷ISSN1057-7157
- 电子ISSN1941-0158
- 文件大小1130.08KB
- 发表时间2003
- DOI10.1109/jmems.2003.818066
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