Microstructure fabrication with a CO2 laser system: characterization and fabrication of cavities produced by raster scanning of the laser beam
- 期刊名称Lab on a Chip
- 作者Jensen, Martin F.; Noerholm, Mikkel; Christensen, Leif H�jslet; Geschke, Oliver
- 卷第3卷
- 期第4期
- 印刷ISSN1473-0197
- 电子ISSN1473-0189
- 文件大小521.28KB
- 发表时间2003
- DOI10.1039/b308153b
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