Enhancement of sp[sup 3] hybridized C in amorphous carbon films by Ar ion bombardment and Si incorporation
- 期刊名称Journal of Applied Physics
- 作者Jung, Hae-Suk; Park, Hyung-Ho; Mendieta, I. R.; Smith, D. A.
- 卷第94卷
- 期第8期
- 印刷ISSN0021-8979
- 文件大小363.32KB
- 发表时间2003
- DOI10.1063/1.1606511
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