发现好书期刊，享受阅读乐趣

海量图书期刊资源，随时随地畅享阅读乐趣

Tribological properties of nitrogen-containing amorphous carbon film produced by dc plasma chemical vapor deposition

Tribological properties of nitrogen-containing amorphous carbon film produced by dc plasma chemical vapor deposition

Zhang, Wei; Wazumi, Koichiro; Tanaka, Akihiro; Koga, Yoshinori

期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
作者Zhang, Wei; Wazumi, Koichiro; Tanaka, Akihiro; Koga, Yoshinori
卷第21卷
期第1期
印刷ISSN0734-2101
文件大小439.01KB
发表时间2003
DOI10.1116/1.1521966

← 返回【学霸图书馆】主页