Interaction of hydrogen-terminated Si(100), (110), and (111) surfaces with hydrogen plasma investigated by in situ real-time infrared absorption spectroscopy
- 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 作者Shinohara, Masanori; Kuwano, Takayuki; Akama, Yosuke; Kimura, Yasuo; Niwano, Michio; Ishida, Hiroyasu; Hatakeyama, Rikizo
- 卷第21卷
- 期第1期
- 印刷ISSN0734-2101
- 文件大小436.14KB
- 发表时间2003
- DOI10.1116/1.1524146