Plasma molding over surface topography: simulation and measurement of ion fluxes, energies and angular distributions over trenches in RF high density plasmas
Doosik Kim, ; Economou, D.J.; Woodworth, J.R.; Miller, P.A.; Shul, R.J.; Aragon, B.P.; Hamilton, T.W.; Willison, C.G.
- 期刊名称IEEE Transactions on Plasma Science
- 作者Doosik Kim, ; Economou, D.J.; Woodworth, J.R.; Miller, P.A.; Shul, R.J.; Aragon, B.P.; Hamilton, T.W.; Willison, C.G.
- 卷第31卷
- 期第4期
- 印刷ISSN0093-3813
- 文件大小912.58KB
- 发表时间2003-08
- DOI10.1109/tps.2003.815248
- 页码691-702