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[IEEE 2003 13th International Crimean Conference 'Microwave and Telecommunication Technology' Conference Proceedings - Sevastopol, Crimea, Ukraine (2003.9.8-2003.9.12)] 13th International Crimean Conference Microwave and Telecommunication Technology, 2003. CriMiCo 2003. - The influence of dense plasma of microwave discharge on the parameters of IC structures

[IEEE 2003 13th International Crimean Conference 'Microwave and Telecommunication Technology' Conference Proceedings - Sevastopol, Crimea, Ukraine (2003.9.8-2003.9.12)] 13th International Crimean Conference Microwave and Telecommunication Technology, 2003. CriMiCo 2003. - The influence of dense plasma of microwave discharge on the parameters of IC structures

Bordusov, S.V.

作者Bordusov, S.V.
文件大小231.01KB
发表时间2003
DOI10.1109/crmico.2003.158998
页码728-729

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