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[Japan Soc. Promotion of Sci International Vacuum Microelectronics Conference - Osaka, Japan (7-11 July 2003)] IEEE/CPMT/SEMI. 28th International Electronics Manufacturing Technology Symposium (Cat. No.03CH37479) - Planar MIS type field emitter fabricated on epitaxial Al/Al/sub 2/O/sub 3//Si(111) structure

[Japan Soc. Promotion of Sci International Vacuum Microelectronics Conference - Osaka, Japan (7-11 July 2003)] IEEE/CPMT/SEMI. 28th International Electronics Manufacturing Technology Symposium (Cat. No.03CH37479) - Planar MIS type field emitter fabricated on epitaxial Al/Al/sub 2/O/sub 3//Si(111) structure

Kim, J.S.; Hoshi, T.; Sawada, K.; Ishida, M.

作者Kim, J.S.; Hoshi, T.; Sawada, K.; Ishida, M.
文件大小146.18KB
发表时间2003
DOI10.1109/ivmc.2003.1223087
页码269-270

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