A NOVEL Z-AXIS ACCELEROMETER WITH PERFECTLY-ALIGNED, FULLY-OFFSET VERTICAL COMBS FABRICATED USING THE EXTENDED SACRIFICIAL BULK MICROMACHINING PROCESS
- 期刊名称International Journal of Computational Engineering Science
- 作者CHO, DONGIL (DAN); KO, HYOUNGHO; KIM, JONGPAL; PARK, SANGJUN; KWAK, DONGHUN; SONG, TAEYONG; CARR, WILLIAM; BUSS, JAMES
- 卷第4卷
- 期第3期
- 印刷ISSN1465-8763
- 文件大小503.19KB
- 发表时间2003-09
- DOI10.1142/S1465876303001599
- 页码493-496
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