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Effects of Nitrogen Radical Irradiation on Performance of SiC MOSFETs

Yano, Hiroshi; Maeyama, Yusuke; Furumoto, Y.; Hatayama, Tomoaki; Uraoka, Yukiharu; Fuyuki, Takashi

期刊名称Materials Science Forum
作者Yano, Hiroshi; Maeyama, Yusuke; Furumoto, Y.; Hatayama, Tomoaki; Uraoka, Yukiharu; Fuyuki, Takashi
电子ISSN1662-9752
文件大小222.17KB
发表时间2003
DOI10.4028/www.scientific.net/MSF.433-436.945
页码945-948