Breakdown Electric Field in 4H-SiC Epitaxial Layer Grown on Various Net-Doping Substrates
- 期刊名称Materials Science Forum
- 作者Ono, Rudi; Fujimaki, Makato; Na, Hoon Joo; Tanimoto, Satoshi; Shinohe, Takashi; Yatsuo, Tsutomu; Okushi, Hideyo; Arai, Kazuo
- 电子ISSN1662-9752
- 文件大小203.80KB
- 发表时间2003
- DOI10.4028/www.scientific.net/MSF.433-436.435
- 页码435-438
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