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Study of ZrN layers deposited by reactive magnetron sputtering

Study of ZrN layers deposited by reactive magnetron sputtering

M. Del Re; R. Gouttebaron; J.-P. Dauchot; P. Leclère; G. Terwagne; M. Hecq

作者M. Del Re; R. Gouttebaron; J.-P. Dauchot; P. Leclère; G. Terwagne; M. Hecq
印刷ISSN0257-8972
文件大小502.95KB
发表时间2003
DOI10.1016/s0257-8972(03)00679-0
页码240-245

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