SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 2 March 2003)] Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology - Design, simulation, and fabrication of a novel integrated microaccelerometer utilizing a post-CMOS fabrication technique
Song, In-Hyouk; Kopparthi, Sunitha; Ajmera, Pratul K.; Srivastava, Ashok; Varadan, Vijay K.; Kish, Laszlo B.
- 作者Song, In-Hyouk; Kopparthi, Sunitha; Ajmera, Pratul K.; Srivastava, Ashok; Varadan, Vijay K.; Kish, Laszlo B.
- 卷第5055卷
- 印刷ISSN0277-786X
- 文件大小229.31KB
- 发表时间2003
- DOI10.1117/12.483580
- 页码78-86