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SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 2 March 2003)] Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology - <title>Design, simulation, and fabrication of a novel integrated microaccelerometer utilizing a post-CMOS fabrication technique</title>

SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 2 March 2003)] Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology - Design, simulation, and fabrication of a novel integrated microaccelerometer utilizing a post-CMOS fabrication technique

Song, In-Hyouk; Kopparthi, Sunitha; Ajmera, Pratul K.; Srivastava, Ashok; Varadan, Vijay K.; Kish, Laszlo B.
  • 作者Song, In-Hyouk; Kopparthi, Sunitha; Ajmera, Pratul K.; Srivastava, Ashok; Varadan, Vijay K.; Kish, Laszlo B.
  • 卷第5055卷
  • 印刷ISSN0277-786X
  • 文件大小229.31KB
  • 发表时间2003
  • DOI10.1117/12.483580
  • 页码78-86
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